Robotic Cleanroom

ACHIEVE GREATER THROUGHPUT WITH HIGH SPEED



Cleanroom Robot Applications

     The demand for cleanroom automation solutions is increasing at a rapid rate with the growth of both the medical and consumer electronics industries. The microchips that control consumer devices are all cut from a delicate silicon wafer that is handled by specially designed robots in a cleanroom environment. Robots used in certain medical and pharmaceutical applications require conformance to cleanroom standards while achieving great speed and repeatability. Kawasaki offers technology to solve today's challenges in cleanroom applications.

     Kawasaki offers a wide variety of robots and equipment suitable for ISO Class 1, 2, and 5 cleanroom classification. These cleanroom robots boast industry leading speed, repeatability, and reliability which are crucial elements in industries focused around increasing demand. The robot arms developed for cleanroom applications are designed with ease of use in mind, including through-arm cable and tube technology, standard interfacing with peripheral equipment, and a full automatic wafer handling teaching option for the semiconductor series.

     Kawasaki can help you reach your cleanroom automation goals with high speed, accurate, and reliable technology.




ADVANCED FEATURES
  1. Speeds up to 5000 mm/s for medical and pharmaceutical robot
  2. Semiconductor robots reach up to 5 FOUPs
  3. Semiconductor robots handle up to 700 WPH
  4. Repeatability of ± 0.1 mm
  5. Collision detection
  6. Full automatic teaching option
  7. Through-arm cable and tube
  8. Ceiling mount arms available
WHY KAWASAKI
  1. Industry leader in cleanroom automation
  2. Standard interfacing with peripheral equipment
  3. Custom gripper mounting
  4. Long-term compliance to standards